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IEC 60747-14-3 Ed. 2.0 b:2009
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IEC 60747-14-3 Ed. 2.0 b:2009 Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors
standard by International Electrotechnical Commission, 04/29/2009
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IEC 60747-14-3:2009 specifies requirements for semiconductor pressure sensors measuring absolute, gauge or differential pressures. The major technical change with regard to the previous edition is the addition of a new subclause 5.9 (measuring method of linearity).This publication should be read in conjunction with IE C 60747-1:2006.