> IEC 62047-1 Ed. 1.0 b:2005 [ Withdrawn ]
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IEC 62047-1 Ed. 1.0 b:2005 [ Withdrawn ]

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IEC 62047-1 Ed. 1.0 b:2005 [ Withdrawn ] Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

standard by International Electrotechnical Commission, 09/27/2005

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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

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Edition: 1.0 Published: 09/27/2005 Number of Pages: 49File Size: 1 file , 690 KB